
Process parts & toolsContact for supply details
Chuck tables and related parts for wafer back grinding
We support the supply and custom specification review of manufacturer products including chuck tables, grinding wheels and robot pick handles for your equipment and wafer conditions.
- Model / product family
- Chuck Table / Wheel
- Application process
- Back Grinding
- Status reference date
- 2026.09.23
Key features
01
8-inch and 12-inch chuck tables
02
Grinding Wheel / Robot Pick Handle
03
Mounting and water inlet review for the equipment's as-shipped configuration
Specifications
- Product configuration
- Chuck Table / Grinding Wheel / Robot Pick Handle
- Wafer size
- 8-inch / 12-inch
- Equipment compatibility review
- DISCO / TSK families · Confirm by specific model
- Customization items
- P.C.D hole / Cooling water inlet positions
Manufacturer supply scope and compatibility require model-specific consultation. Wafer processing accuracy and TTV are evaluated under actual process conditions.
Options & customization
We check the equipment model and shipment date, chuck drawings and cooling water inlet position to assess compatible specifications.
Request an application review