Chuck Table / Wheel

Back Grind Parts

Chuck tables and related parts for wafer back grinding

Back Grind Parts
Back Grind Parts · Image from the FLC product presentation
Process parts & toolsContact for supply details

Chuck tables and related parts for wafer back grinding

We support the supply and custom specification review of manufacturer products including chuck tables, grinding wheels and robot pick handles for your equipment and wafer conditions.

Model / product family
Chuck Table / Wheel
Application process
Back Grinding
Status reference date
2026.09.23
Discuss product specifications

Key features

01

8-inch and 12-inch chuck tables

02

Grinding Wheel / Robot Pick Handle

03

Mounting and water inlet review for the equipment's as-shipped configuration

Specifications

Product configuration
Chuck Table / Grinding Wheel / Robot Pick Handle
Wafer size
8-inch / 12-inch
Equipment compatibility review
DISCO / TSK families · Confirm by specific model
Customization items
P.C.D hole / Cooling water inlet positions

Manufacturer supply scope and compatibility require model-specific consultation. Wafer processing accuracy and TTV are evaluated under actual process conditions.

Options & customization

We check the equipment model and shipment date, chuck drawings and cooling water inlet position to assess compatible specifications.

Request an application review
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